Critical issues in scanning electron microscope metrology
نویسندگان
چکیده
منابع مشابه
Critical Issues in Scanning Electron Microscope Metrology
National Institute of Standards and Technology, Gaithersburg, MD 20899-0001 During the manufacturing of presentday integrated circuits, certain measurements must be made of the submicrometer structures composing the device with a high degree of repeatability. Optical microscopy, scanning electron microscopy, and the various forms of scanning probe microscopies are major microscopical techniques...
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ژورنال
عنوان ژورنال: Journal of Research of the National Institute of Standards and Technology
سال: 1994
ISSN: 1044-677X
DOI: 10.6028/jres.099.059